Details
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Manufacturer
SMC
Model
XGT223-46236-1F
Accessories
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Brand
SMC
Series
XGT
Valve Material
FKM (Gate O-ring Material)
Specification
SMC Slit Valve, SMC
