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M334-44977

SMC High Vacuum Angle Valve

Product Code: XLA-25-2

 

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Available to Order

tech sheet

Details

Width mm
121
Valve Material
Aluminium
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Brand
SMC
Actuation
Normally Closed
Seal Material
FKM
Length mm
74
Seal Type
Bellows seal
Body Material
Aluminium
Height mm
48
Series
XL2

Specification

SMC High Vacuum Angle Valve, SMC